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Introductions
process section | UVCP |
MTORR | 150 |
O2(SCCM) | 1,500 |
stable voltage(MTORR) | 200 |
power (output)(KW) | 6 |
times(s) | 20 |
temperature(℃) | 25 |
contact angle(O) | ≤20 |
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